Housing with MEMS microphone, electric appliance with housing with MEMS microphone and methods for preparing
2010
Housing with MEMS microphone - with a carrier (TR), - with a mounted on the carrier microphone chip (MC), - with a mounted on the carrier further chip (WC), - with a cover (AD) enclosing together with the carrier a cavity within which the microphone chip (MC), and the further chip (WC) is disposed, - having a first sound inlet opening (SO1) in the cover, - the cover comprises metal or a metallic coating, - to the first sound inlet opening around a compressible and resilient seal structure (DS) is arranged as an acoustic seal between the housing and the microphone and - the compressibility and the elasticity of the sealing structure unevenness of the housing interior or an incomplete plane-parallel arrangement of the microphone and housing compensates.
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