Old Web
English
Sign In
Acemap
>
Paper
>
Surface Reaction Analyses for Atomic Scale Processing by Beam Experiments
Surface Reaction Analyses for Atomic Scale Processing by Beam Experiments
2019
Kazuhiro Karahashi
Tomoko Ito
Satoshi Hamaguchi
Keywords:
Atomic layer deposition
Molecular beam
Beam (structure)
Molecular physics
Atomic units
Materials science
surface reaction
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]