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EUV spectroscopy of Kr, Y and Mo ions using CoBITs
EUV spectroscopy of Kr, Y and Mo ions using CoBITs
2020
Emma Sokell
Safdar Ali
T. Kondo
M Monobe
S Ohishi
Hiroyuki Sakaue
Nobuyuki Nakamura
Keywords:
Spectroscopy
Materials science
Analytical chemistry
Ion
Extreme ultraviolet lithography
Correction
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