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Finite element and semi-analytic modeling of the temperature field of a wafer with moving heat loads
Finite element and semi-analytic modeling of the temperature field of a wafer with moving heat loads
2017
D.W.M. Veldman
R.H.B. Fey
Hans Zwart
M.M.J. van de Wal
J.D.B.J van den Boom
H Henk Nijmeijer
Keywords:
Wafer
Finite element method
Electronic engineering
Structural engineering
Materials science
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