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Formation and properties of defects in n-type silicon after irradiation followed by thermal annealing
Formation and properties of defects in n-type silicon after irradiation followed by thermal annealing
1994
P. V. Kuchinskii
V. M. Lomako
L. N. Shakhlevich
Keywords:
Atomic physics
Radiochemistry
Annealing (metallurgy)
Chemistry
Irradiation
Silicon
Correction
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