Analysis of laser-induced surface profile variation in silicon glass based on particle swarm optimization algorithm

To increase the lifetime of components in high power lasers and to study downstream light field the influence of the damaged optical components, numerical model of surface profile of damaged optical components were built with particle swarm optimization algorithm, and the relationship between the damage degree and the parameter of numerical model was analyzed. First laser irradiation experiment was carried out to acquire the damaged optical components. Then surface morphology was measured with Zygo interferometer system. With a typical Gaussian filter. A numerical model of one dimensional lineout of surface profile was established with particle swarm optimization algorithm. Numerical results shows that the model was valid with the particle swarm optimization (PSO) algorithm. The results also shows that there was a relationship between parameter of the model and the damage degree.