Ferroelectric HfO2 Capacitors for Varactor Application in GHz

Yuwei Lin,Kazuto Mizutani,Takuya Hoshii,Hitoshi Wakabayashi,Kazuo Tsutsui,Yi-Fan Tsao,Ting-Jui Huang,Heng-Tung Hsu,Kuniyuki Kakushima

Ferroelectric HfO2 Capacitors for Varactor Application in GHz

2020

Yuwei Lin
Kazuto Mizutani
Takuya Hoshii
Hitoshi Wakabayashi
Kazuo Tsutsui
Yi-Fan Tsao
Ting-Jui Huang
Heng-Tung Hsu
Kuniyuki Kakushima

The capacitance extraction of ferroelectric HfO2 capacitors was characterized at a frequency of 1GHz. By applying a bias voltage in the non-switching region of the ferroelectric HfO2 films, a varactor operation was confirmed.

Keywords:

Ferroelectricity
Capacitor
Optoelectronics
Varicap
Materials science

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