Motion sensor structures and methods

The present disclosure provides embodiments of a motion sensor structure. Motion sensor structure comprising: a first substrate having an integrated circuit formed thereon; a second substrate, bonded to the first substrate through the first surface, wherein the second substrate comprises a movement sensor which is formed on; and a third substrate, and a second engaging surface of the second substrate, wherein the substrate includes a recessed region and a third motion sensor alignment. The present invention further provides a method of motion sensors.