Improved method of making a device a cavity formed between a suspension element based on semi-buried insulating pads in a substrate and this substrate

The invention relates to an improved method for making a device comprising one or more cavities (150a, 150b) defined between a substrate (100) based on at least one semiconductor material and a given membrane (140) resting on the top of insulating pads (104a, 104b, 104c) projecting from the substrate, the method for adapting the height of the cavities or independently of the insulating pads