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Development of High Frequency Type MEMS Ultrasonic Array Sensor Using P(VDF/TrFE) Thin Films
Development of High Frequency Type MEMS Ultrasonic Array Sensor Using P(VDF/TrFE) Thin Films
2019
Tsunehisa Tanaka
Shuichi Murakami
Mayumi Uno
Keywords:
Electronic engineering
Thin film
Engineering
Microelectromechanical systems
Ultrasonic sensor
Optoelectronics
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