Capacitance Measurements in CMOS imager appNcations

fax: +33 4 76 92 57 32 Abstract: measurement of dark current and capacitance of pixel array are fundamental in the development of new sensor technologies. These parameters are usually very low and require large structures to be accurately measured. This is area consuming and, in any case, needs the use of high-resolution semi-automatic test bench. In this paper, a new methodology based on a Capacitance discharge measurement is proposed and validated by comparison to direct measurements. It offers a small structure need, a low-test time and a high resolution, and can also he implemented on full automatic test bench for in-line monitoring.