Synthesis and characterization of Ti–Si–C–N nanocomposite coatings prepared by a filtered vacuum arc method

Abstract Ti–Si–C–N nanocomposite coatings were synthesized by a filtered vacuum arc (FVA) technique. A metal organic precursor, tetramethylsilane (TMS), was used as a source for silicon and carbon to deposit the Ti–Si–C–N nanocomposite coating with a Ti cathode source. The chemical and microstructural properties of the as-deposited coatings were systematically investigated using X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and transmission electron microscopy (TEM). Nanoindentation and scratch tests were carried out to evaluate the mechanical and adhesion properties of the coatings. From the XPS analysis, it was found that the Si content in the coating increased from 2 to 16 at.% as the TMS flow rate was increased from 5 to 20 sccm. The TEM analysis clearly demonstrated that the coatings were composed of crystalline TiCN along with amorphous Si 3 N 4 as a secondary phase. From the XRD results, it was found that the crystallite size of TiCN increased with increasing Si content. The microstructure and mechanical properties of the TiSiCN coatings prepared by this method exhibited strong dependencies on the silicon content. A maximum hardness of 49 GPa and a coefficient of friction of 0.17 were obtained for the film with a silicon content of 3 at.%.