Phosphate molecular sieve based humidity sensor and preparation method thereof

The invention relates to a phosphate molecular sieve based humidity sensor and a preparation method thereof and belongs to the technical field of humidity sensors. An AlPO4-5 molecular sieve is adopted as a sensitive layer, so that not only is the good stability of the AlPO4-5 molecular sieve used, but also the advantage of higher specific surface area of the AlPO4-5 molecular sieve can be effectively used. Meanwhile, the preparation method adopts simple processes and is applicable to large-batch production, and the prepared device is small in size, so that the preparation method has an important application value. The AlPO4-5 molecular sieve based humidity sensor capable of rapid responding and recovering disclosed by the invention consists of a ceramic substrate, Au metallic interdigital electrodes and an AlPO4-5 sensitive layer which are sequentially arranged from bottom to top, wherein the Au metallic interdigital electrodes are formed on the ceramic substrate by adopting a silk-screen printing technology, and the AlPO4-5 sensitive layer is formed on the interdigital electrodes by adopting a coating technology; the thickness of the AlPO4-5 sensitive layer is 2-4 microns, the grain diameter of the AlPO4-5 sensitive layer is 6-10 microns, the width and spacing of the metallic interdigital electrodes are 0.15-0.20mm, and the thickness of the metallic interdigital electrodes is 100-150nm.