Compact 12×12-Pixel THz Camera using AlGaN/GaN HEMT Technology Operating at Room Temperature

We report on a THz detector camera with a monolithically integrated 12×12 detector array of AlGaN/GaN TeraFETs. The camera operates in the range 100 GHz – 2 THz and is the first of its kind with a multidimensional array of 144 pixel based on III-V semiconductor technology. The sensitivity efficiency of the camera is evaluated between 100 GHz and 1 THz using InGaAs-based photoconductive signal sources. Its analog frontend electronics allows a frame rate of around 100 fps while maintaining a 0.5 nA (RMS) input referred noise current. Additionally, the spectral frequency response is measured in order to evaluate the potential of these detectors for industrial applications.