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HYDRODYNAMICS AND MASS-TRANSFER FEATURES IN LOCAL SILICON-ETCHING REGION DURING MESA-TOPOGRAPHY FORMATION
HYDRODYNAMICS AND MASS-TRANSFER FEATURES IN LOCAL SILICON-ETCHING REGION DURING MESA-TOPOGRAPHY FORMATION
1991
S.O. Izidinov
V. I. Gaponenko
Keywords:
Atomic physics
Etching
Materials science
Silicon
Mass transfer
silicon etching
Mesa
Optoelectronics
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