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Nitrogen doping of Al- and Ti-phosphate through plasma-enhanced ALD
Nitrogen doping of Al- and Ti-phosphate through plasma-enhanced ALD
2020
Lowie Henderick
Hamid Hamed
Felix Mattelaer
Matthias Minjauw
Momo Safari
Philippe M. Vereecken
Christophe Detavernier
Keywords:
Plasma
Phosphate
nitrogen doping
Inorganic chemistry
Materials science
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