Electrostatic tuning of drive and sense modes in two-gimbal torsional gyroscope

This paper demonstrates electrostatic tuning of drive and sense modes in two-gimbal torsional gyroscope. The gyroscope is fabricated by SU-8 based UV-LIGA process and is then packaged in vacuum. The device is first characterized for frequency responses of drive and sense modes using laser Doppler vibrometer (LDV). Finally, electrostatic tuning of drive and sense modes is carried out by varying DC bias voltage applied to the proof-mass.