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Development of a PECVD Line Source for the Roll-to-Roll Deposition of Thin Film Silicon Solar Cells
Development of a PECVD Line Source for the Roll-to-Roll Deposition of Thin Film Silicon Solar Cells
2010
Neil Morrison
Peter Sauer
H.-G. Lotz
D. Wagner
Gerhard Steiniger
A. Lopp
D Ball
Keywords:
Plasma
Thin film
Roll-to-roll processing
Plasma-enhanced chemical vapor deposition
Materials science
Silicon
Composite material
Line source
Deposition (law)
Optoelectronics
Correction
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