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Formation of Ti/Al/Ti ohmic electrodes with smooth surface on AlGaN/GaN HEMT
Formation of Ti/Al/Ti ohmic electrodes with smooth surface on AlGaN/GaN HEMT
2021
Taisei Nakano
Yuzuru Narita
Keywords:
algan gan
High-electron-mobility transistor
Materials science
Ohmic contact
smooth surface
Optoelectronics
Electrode
Correction
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