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Generation and annihilation of plasma-induced defects ~effects of Ar ion irradiation~
Generation and annihilation of plasma-induced defects ~effects of Ar ion irradiation~
2020
Shota Nunomura
Kazuya Nakane
Takayoshi Tsutsumi
Koji Matsubara
Masaru Hori
Keywords:
Annihilation
Plasma
Photochemistry
Ion
ion bombardment
Materials science
Irradiation
Silicon
Correction
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