Manufacturing method of lens for collecting color center single photons

2013 
The invention provides a manufacturing method of a lens for collecting color center single photons. The manufacturing method comprises the following steps: (1) finding the position of a color center in a diamond block; and (2) etching a fan-shaped spherical surface taking the color center as a sphere center into the surface of the diamond block by using a plurality of annular particle beam pattern groups. In each annular particle beam pattern group, the circle centers of annular particle beam patterns are staggered, the radiuses of the inner circles of the annular particle beam patterns are equal, and the circle centers of the annular particle beam patterns are uniformly distributed on a same circumference. The inner diameters of the annular particle beam patterns in the annular particle beam pattern groups gradually decrease to be approximate to 0. Through adoption of the manufacturing method, the collection and utilization efficiencies of the single photons of a diamond single-photon source can be increased remarkably. The manufacturing process of the method is simple. The appearance of a diamond hemispherical lens is smoother under the condition that focused ion beam machining equipment with limited accuracy is used, and the collection and utilization efficiencies of the single photons are closer to theoretical values.
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