Influence of the Deposition Temperature on the Properties of Medium-Frequency Magnetron Sputtering WS2 Soft Coated Tools

WS2 soft coated tools were deposited by medium-frequency magnetron sputtering, multi-arc ion plating and ion beam assisted deposition technique on the YT15 cemented carbide substrates. The influence of the deposition temperature on the coating properties has been studied. The coatings exhibited a dense and fine grained structure. WS2 coatings revealed a (002) preferred crystal orientation. WS2 soft coatings with deposition temperature of 200°C revealed a better crystallization of (002) preferred crystal orientation of Ⅱ texture than other three deposition temperatures. And the adhesive strength could get to 43.25N which was the largest. The thickness of WS2 coatings decreased firstly, then increased, and finally reduced with the increasement of deposition temperature. And the microhardness of the coatings increased firstly, then decreased, and finally increased with the increasement of deposition temperature.