Apparatus for coating a plurality in close packing on a susceptor disposed substrates

The invention relates to an apparatus for coating a plurality of regularly on a support surface (2) of a process chamber (14) associated susceptor (1) arranged substrates (3), wherein the bearing surface (2) forms bearing flanks (5) to the rim of each substrate (3 ). In order to minimize the free Susceptoroberflache is proposed that the bearing flanks projecting from the side walls (5) of from the contact surface (2) individual sockets (4) are formed.