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Plasma Etching Process Induced Poly Film Damage
Plasma Etching Process Induced Poly Film Damage
1997
Po-Tao Chu
Fang-Cheng Chen
Chih-Chien Hung
Ying-Chen Chao
Keywords:
Scanning electron microscope
Plasma processing
Optical microscope
Reactive-ion etching
Etching
Analytical chemistry
Plasma etching
Materials science
Optoelectronics
random access memory
Optics
Correction
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