High-resolution 6-inch LCD using a-Si TFT with TaOx/SiNx double insulating layer

Abstract A TFT array having 476 × 630 (299 880) pixels employing a-Si TFT with TaO x /SiN x double insulating layers is developed for a 6-inch diagonal LCD display panel. The panel is driven by a progressive scanning method for which the address time is 30 μs. The parameters of this TFT array were determined by computer simulation, and as a result of this, highly improved driving and viewing characteristics were obtained.