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Mechanism of Chip Formation in Nanomachining of Sputtered Cu Film with AFM
Mechanism of Chip Formation in Nanomachining of Sputtered Cu Film with AFM
2012
Takuto Yoshida
Yoshio Ichita
Ryuunosuke Satou
Hideo Ueno
Keywords:
Chip formation
Nanotechnology
Atomic force microscopy
Materials science
Analytical chemistry
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