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Polymers of norbornenyl-4-phenol: Dissolution rate characteristics, positive tone photo-patterning, and polymer properties
Polymers of norbornenyl-4-phenol: Dissolution rate characteristics, positive tone photo-patterning, and polymer properties
2017
Paul J. Evans
Chad Brick
Andrew Bell
Pramod Kandanarachchi
Jennifer Thoresen
Larry F. Rhodes
Osamu Onishi
Haruo Ikeda
George M. Benedikt
Elaine Koronich
Keywords:
Polymer
Dielectric
Dissolution
Materials science
Organic chemistry
Phenol
Diazonaphthoquinone
Correction
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