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Self-consistent particle simulation of axisymmetrical magnetron discharge
Self-consistent particle simulation of axisymmetrical magnetron discharge
1997
Shuji Kondo
Kenichi Nanbu
kondou syuuzi
nanbu ken'iti
Keywords:
Atomic physics
Cavity magnetron
Materials science
secondary electron emission coefficient
particle simulation
self consistent
Charged particle
Magnetization
Monte Carlo method
Correction
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