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Effect of hydrogen flow on structure and properties of diamond like carbon films
Effect of hydrogen flow on structure and properties of diamond like carbon films
2016
Liu Lei
Du Kai
Wang Tao
He Zhibing
Zhang Ling
Yi Yong
Keywords:
X-ray photoelectron spectroscopy
Deposition (law)
Scanning electron microscope
Electron spectroscopy
Carbon film
Hydrogen
Material properties of diamond
Carbon
Chemical engineering
Materials science
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