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Anisotropic Etching of Silicon
Anisotropic Etching of Silicon
1978
W. Anacker
E. Bassous
F. F. Fang
R. E. Mundie
H.N. Yu
Keywords:
Dry etching
Deep reactive-ion etching
Reactive-ion etching
Isotropic etching
Composite material
Etching
Silicon
Microelectromechanical systems
Etching (microfabrication)
Materials science
Optoelectronics
anisotropic etching
Correction
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