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In-Line Resistance Measurement of Single Nanometer-Wide Trenches and Fins
In-Line Resistance Measurement of Single Nanometer-Wide Trenches and Fins
2016
Janusz Bogdanowicz
Brigitte Parmentier
Andreas Schulze
Alain Moussa
Clement Merckling
B. Kunert
Weiming Guo
Yves Mols
C. Porret
Erik Rosseel
Andriy Hikavyy
Ole Hansen
Dirch Hjorth Petersen
Henrik Hartmann Henrichsen
Peter Folmer Nielsen
Wilfried Vandervorst
Keywords:
Nanometre
Fin
Electronic engineering
Materials science
Artificial intelligence
Engineering physics
line resistance
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