Sensor means for measuring magnetic fields and manufacturing method thereof
2001
Sensor device for the measurement of magnetic fields, in particular over a wide measuring range, comprising: a semiconductor chip (1); at least one magneto transistor element (2); and with at least one magnetoresistive sensor element (3); wherein the magneto transistor element (2) and the magnetoresistive sensor element (3) for measurement of magnetic fields parallel to the surface of the semiconductor chip (1) monolithically in the semiconductor chip (1) are integrated.
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