Three-dimensional potential mapping of nanostructures with electron-holographic tomography

The physical properties of solids are strongly correlated with the intrinsic electrostatic potentials. Therefore, the knowledge of the potential distribution is of high interest in many fields of research, e.g. solid-state physics, materials science or semiconductors industry. Electron-holographic tomography, i.e. combining off-axis electron holography with tomography, uses a series of electron holograms over a large range of object tilt angles to reconstruct the electrostatic potential in three dimensions [1]. The holographically reconstructed phase signal is - in the absence of diffraction effects - proportional to the projected potential, hence satisfies the projection requirement for tomography.