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On the degradation of anti-sticking layers during nanoimprint lithography
On the degradation of anti-sticking layers during nanoimprint lithography
2008
R. Galand
D Boutry
A. Beaurain
A. Francone
B. Pelissier
M. Zelsmann
B. Pépin Donat
J. Boussey-Said
Keywords:
Nanoimprint lithography
Composite material
Materials science
Degradation (geology)
Nanotechnology
Correction
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