Design and analysis of new silicided nano crystal dots field programmable ESD protection structures in BiCMOS

This paper discusses design and analysis of new nano crystal quantum dot (NC-QD) based field programmable electrostatic discharge (ESD) protection structures. Prototype NC-QD ESD structures were verified experimentally, achieving a wide ESD triggering voltage tuning range of 2.5V, very fast response time of ∼100pS, ESD protection level of 25mA/μm in human body model (HBM) and 400mA/μm in charged device model (CDM), and very low leakage current of I leak ∼15pA.