Iterative Learning Cross-Coupled Control for XY Table Based on Real-Time Contour Error Estimation

The contour accuracy of XY table directly driven by two linear motors was influenced by the complicated reel-time contour error model of free-form curves, uncertainty external disturbance and dynamic matching between X axis and Y axis. To establish XY table model that easily calculated and suitable for free-form curves, real-time contour error estimate method was adopted. In order to reduce uncertainty external disturbance and dynamic matching between X axis and Y axis, the iterative learning cross-coupled controller (ILCCC) was designed for current compensation on X axis and Y axis. Simulation results show that the control scheme can enhance the robustness of the system, and effectively improve the XY table of contour precision.