Electroplating and characterization of cobalt–nickel–iron and nickel–iron for magnetic microsystems applications
2001
Abstract The magnetic properties of pulse reverse (PR) electroplated CoNiFe and DC electroplated NiFe are presented. CoNiFe is a very promising material for magnetic microsystems due to the possibility of achieving a high saturation flux density ( B s ) and a low coercivity ( H c ). A new bath formulation has been developed, which by means of PR electroplating makes it possible to deposit high B s CoNiFe with a low residual stress level. The magnetic properties have been determined using a new simple measurement setup that allows for wafer level characterization. The results have been validated by comparison to measurements performed with a vibrating sample magnetometer (VSM).
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