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Reaction of silicon with gaseous CO generated from graphite material parts in Czochralski silicon furnace
Reaction of silicon with gaseous CO generated from graphite material parts in Czochralski silicon furnace
2018
Hiroyuki Tsubota
Yuta Nagai
Yoshiaki Abe
Hisashi Matsumura
Keywords:
Graphite
Materials science
Crystal growth
Metallurgy
Silicon
Correction
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