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Analysis of Silicide/Silicon Interfacial Stractures Using Medium-Energy Ion Scattering.
Analysis of Silicide/Silicon Interfacial Stractures Using Medium-Energy Ion Scattering.
1995
Shigeaki Zaima
Keywords:
Scattering
Ion
Ceramic materials
Silicide
Materials science
Silicon
Inorganic chemistry
Optoelectronics
medium energy
Correction
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