LSI testing technique with IDD spectrum method : Application to practical production lines : Technologies supporting semiconductor scientific manufacturing : Process monitoring, testing, failure analysis and reliability

Current-based testing methods are powerful because they can detect many faults which cannot be detected by conventional voltage-based testing methods. In this paper, a new current-based testing method is proposed. The method is used to analyze a supply current in the frequency domain, and detect faults in a short time. An analyzing unit using the proposed method has been developed and built into a conventional logic tester. Experimental results for practical large size products using the tester demonstrated that the proposed method can detect faults in a short time which were undetectable using conventional testing methods. It is feasible to incorporate our method into practical production lines.