Old Web
English
Sign In
Acemap
>
Paper
>
Fabrication of 4H-SiC PiN diodes on substrate grown by HTCVD method
Fabrication of 4H-SiC PiN diodes on substrate grown by HTCVD method
2019
Yuichiro Tokuda
Hideyuki Uehigashi
Koichi Murata
Hidekazu Tsuchida
Keywords:
Substrate (chemistry)
Physics
Optoelectronics
Optics
PIN diode
Fabrication
Correction
Source
Cite
Save
Machine Reading By IdeaReader
3
References
0
Citations
NaN
KQI
[]