Comparison of microactuators based on piezoelectric layered plates with d31 and d33 coupling

In this paper, analytical models of partially covered piezoelectric plate actuators operated with longitudinal ( d 33 ) or transveral ( d 31 ) coupling are developed. The models are based on classical laminated plate theory and linear piezoelectricity. Explicit formulas have been derived for thin piezoelectric films and the optimal structural dimensions are determined. A performance comparison between the two modes of operation is carried out. Finite element analysis validates the analytic models. Finally, the performance of an actuator with an inter digital electrode-based longitudinal coupling is compared with its counterpart transversally coupled actuator. The comparison determines the stronger actuator when operation is electric-field-strength limited.