Reviews: Torsional spring mechanism resonant scanner’s technology

The design parameters of torsional spring mechanism resonant scanner are the scanning angle, frequency and also power consumption. Generally, high resolution scanning is desired due to the reason of smaller devices are developed. This review covers the linear optical and rotational scanner technologies for both the MEMS and non-MEMS. The overview of scanner technology is discussed accordingly to the recent researches and development performed on the scanning technology. The review is categorized into several sub-topics according to the scanner’s components. The component includes the actuator used, the compliant structure and the control system. Furthermore, damping characteristics are also presented in this review as it affected the scanning angle for the scanner. Finally, the application of the scanner is discussed conferring to the fields. The fields include light detection and ranging systems, medical and also biomedical systems. This review serves as the reference for the mechanical design of the scanning devices.