Production of a Large-Diameter Uniform ECR Plasma with a Lisitano Coil

A large-diameter uniform plasma was demonstrated to be produced by electron cyclotron resonance heating with a slotted Lisitano coil of 40 cm diameter. The diameter of the realized uniform plasma was found to be almost equal to that of the Lisitano coil. It was also suggested that the microwave is propagated in the whole region inside the Lisitano coil, and produces the uniform plasma.