Production of Radicals and Particulates by Interaction between High-Density Hydrogen Plasma and Graphite Plate

Laser-induced fluorescence was employed to detect CH, C2 and H radicals in high-density H2 plasma interacting with a graphite plate. The densities of the radicals were examined as functions of the gas pressure, the temperature of the graphite plate, and the radial distance from the plasma center. In addition, we observed the formation of particulates on the graphite plate irradiated by the high-density plasma column. By considering the experimental results, we conclude that the interaction between the high-density hydrogen plasma and the graphite plate is governed by a mechanism similar to reactive ion etching.