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Fabrication of UV transmission blazed gratings by holography-ion beam etching
Fabrication of UV transmission blazed gratings by holography-ion beam etching
2021
Zhiwen Chen
Yanan Wang
Maoqi Cai
Ruizhi Li
Tao Ren
Keqiang Qiu
Zhengkun Liu
Huoyao Chen
Yilin Hong
Keywords:
Optoelectronics
Fabrication
Materials science
Transmission (telecommunications)
Holography
ion beam etching
Correction
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