Analysis of Low Frequency Noise Variation in Temperature Sensor With Bi 2 Mg 2/3 Nb 4/3 O 7

Sensitivity characteristics of temperature sensor with (BMNO) layer were investigated with low frequency noise measurement. Temperature sensor with BMNO layer had high reliability and high sensitivity comparing with conventional MOS type temperature sensor. Annealing temperature variation effects with , and were measured and analyzed. Annealing temperature determines trap distribution and annealing sample has different pattern comparing with other samples. Results of low frequency noise can offer the design guide of temperature sensor performance.