Position control device of the flexible substrate

Conveying the belt-like flexible substrate (1) in the vertical orientation in the transverse direction, the at the installed unit to the transport path of the substrate, the position control device of the flexible substrate in a processing apparatus for processing the substrate (100) includes a pair of holding rollers (131, 132) for holding the upper edge of the substrate, support mechanism for rotatably and mutually detachably supporting the pair of nip roller and (140), the and biasing means (150) via a support mechanism to impart pressure to said pair of holding rollers, wherein and a pressure adjusting means (160) by said biasing means. The pair of clamping rollers, the pressing direction with respect to holding surface of the substrate is supported so that the rotation direction is the conveying direction substantially the same direction at a and the clamping face inclined towards the substrate widthwise edge side there. It is possible to suppress the generation of drooping and wrinkles of the band-shaped flexible substrate, with allows the high-quality treatment, in the transport in the opposite direction of the flexible substrate is available.