A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

Testing and characterization of Micro-Electro-Mechanical Systems (MEMS) and Micro-Opto-Electro-Mechanical Systems (MOEMS) can be very challenging due to the multi-domain nature of these devices. Nowadays high volume, high-cost, and accurate measuring systems are necessary to characterize and test MEMS and MOEMS especially to examine motions, deflections and resonance frequencies. This paper presents a fast-developing and low-cost environment for MEMS and MOEMS testing and characterization. The environment is based on a flexible mixed-signal platform, named ISIF (Intelligent Sensor InterFace). As a case study we consider the characterization of a double axis scanning micromirror. The testing environment has been validated by comparing measurement results with results obtained by Finite Element Method simulation performed with Comsol Multiphysics™. Finally, these results have been used to create an electrical equivalent model of the micromirror.