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Thermal Stability of MIM Capacitor Fabricated by ALD System at High Temperature
Thermal Stability of MIM Capacitor Fabricated by ALD System at High Temperature
2006
Cha-Hsin Lin
Ching-Chiun Wang
Pei-Jer Tzeng
Chieh-Shuo Liang
Wen-Miao Lo
Heng Yuan Li
Lurng-Shehng Lee
Shen-Chuan Lo
Yu-Wei Chou
M. J. Tsai
Yi-Jen Chan
Keywords:
Capacitor
Thermal stability
Electronic engineering
Materials science
Optoelectronics
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